High-performance CMOS-MEMS manufacturing technology

Summary of the technology

A new technology for low-cost and high-performance MEMS sensor design using a standard CMOS process has been patented. This allows for virtually any microprocessor and integrated circuit to become aware of its physical operating environment thanks to the multiple sensory information that it provides at minimum additional cost. Partners to further develop the system and/or to establish commercial agreements along with technical cooperation are sought.

Universitat Politècnica de Catalunya - UPC
Universitat Politècnica de Catalunya - UPC
Universitat Politècnica de Catalunya - UPC

The Challenge


Microprocessors have dramatically increased their performance over the years, yet they are no more than powerful arithmetic calculators. In order to take the next step on their evolution, physical awareness is needed. The monolithic sensor integration that this technology enables will allow any microprocessor and integrated circuit to become aware of their environment without needing complex packaging solutions or dramatic area increase, opening the door to a myriad of new applications and innovative game-changing products. However, MEMS manufacturing inside CMOS poses several challenges in terms of reliability, repeatability and performance, issues that can be addressed using our patented technology, design techniques and skill set.

The Technology


Our technology allows CMOS-MEMS monolithic volume manufacturing without loosing any significant yield and reliability due to manufacturing imperfections. We have currently developed several base sensors, as accelerometers, magnetometers and barometers, integrated monolithically with their signal-conditioning electronics. They take full advantage of our patented technology to provide multiple sensor data to a microprocessor integratable on the same electronics die while only increasing its manufacturing cost by less than $0.01 per chip.

Current stage of development


The core technology has been demonstrated in a relevant environment (TRL6). Technology demonstrators are available for inertial sensors (TRL6), laboratory prototypes are available for magnetometers (TRL4) and proof of concept tests are available for pressure sensors (TRL3).

Applications and Target Market

  • Consumer / wearables, enabling more compact and movement-aware products
  • Consumer / security, making chips aware of changes in their environment
  • Health / implants, allowing for medical-data gathering in a minimum volume

Innovative advantages

  • CMOS-compatible monolithic sensor integration
  • High-yield, high-performance, low-cost, low power consumption
  • Multiple sensor data (inertial / accelerometer, magnetic / compass, pressure / barometer…) readily available in any chip
  • IP and reference designs blocks available
  • Silicon-proven technology

Intellectual property status

  • Granted Patent
  • Patent application number :-

Related Keywords

  • Measurements and Standards
  • Sensor Technology related to measurements
  • Manufacturing
  • Health care
  • Consumer Services

About Universitat Politècnica de Catalunya - UPC

The Universitat Politècnica de Catalunya - BarcelonaTech is a public institution dedicated to higher education and research in the fields of engineering, architecture and science, which contributes its knowledge and expertise in order to increase scientific output, transfer its results to society and provide a network of scientific and technical state-of-the-art facilities and technology valorization services that place us at the leading edge of innovation and economic development.

The UPC has established itself as a driver of innovation and is the technology partner of choice for companies and organizations with which it develops projects and builds partnerships. A role borne out by the numerous agreements and research projects that have been set in motion by groups, organizations and laboratories; the creation of new technology-based companies; the generation and exploitation of patents, and the scientific and technical services UPC makes available to its environment in order to generate progress and employment.

The Technology Transfer Office (SGI) is responsible of Designing, coordinating and implementing research valorisation strategies, carrying out the protection policy of the research results, marketing these results through license contracts and designing and setting up the University's enterprise creation model in order to transfer the results of the research to the market, protect and commercialize these results, promote the culture of entrepreneurship and innovation, and create technology-based companies within the UPC environment.

Universitat Politècnica de Catalunya - UPC

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