a new electrical discharge to generate meta stable atoms, positive or negative ions as well as dissociated molecules with high efficiency and reliability.
Project ID : 11-2013-631
A method of fabricating a film. The method comprises directing onto a substrate a pulsed supersonic beam of a molecular precursor characterized by kinetic energy of at least 1 eV per molecule, such that non-volatile species of molecules of the precursor are deposited on the substrate.
Additional information can be provided upon request.
Project manager
Rona Samler
VP, BD Physical Science, Medical Device, Chemistry
Project researchers
Uzi Even
T.A.U Tel Aviv University, Exact Sciences
School of Chemistry
Fernando Patolsky
T.A.U Tel Aviv University, Exact Sciences
School of Chemistry
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