Dielectric Barrier Discharge Source for generating beam of nanoparticles
Innovative Products and Technologies
a new electrical discharge to generate meta stable atoms, positive or negative ions as well as dissociated molecules with high efficiency and reliability.
Project ID : 11-2013-631
A method of fabricating a film. The method comprises directing onto a substrate a pulsed supersonic beam of a molecular precursor characterized by kinetic energy of at least 1 eV per molecule, such that non-volatile species of molecules of the precursor are deposited on the substrate.
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